Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12340973 | Particle beam system including a multi-beam deflection device and a beam stop, method for operating the particle beam system and associated computer program product | Stefan Schubert, Dieter Schumacher, Erik Essers, Ingo Mueller, Arne Thoma +2 more | 2025-06-24 |
| 12255040 | Multi-beam particle beam system and method for operating same | Dirk Zeidler, Christof Riedesel, Arne Thoma, Georgo Metalidis, Stefan Schubert +4 more | 2025-03-18 |
| 12249478 | Particle beam system for azimuthal deflection of individual particle beams and method for azimuth correction in a particle beam system | Hans Fritz, Andras G. Major, Dirk Zeidler, Arne Thoma | 2025-03-11 |