Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12347661 | Pressure control system for a multi-head processing chamber of a plasma processing apparatus | Maolin Long, Changle Guan | 2025-07-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12347661 | Pressure control system for a multi-head processing chamber of a plasma processing apparatus | Maolin Long, Changle Guan | 2025-07-01 |