Issued Patents 2025
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12347661 | Pressure control system for a multi-head processing chamber of a plasma processing apparatus | Maolin Long, Junliang Li | 2025-07-01 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12347661 | Pressure control system for a multi-head processing chamber of a plasma processing apparatus | Maolin Long, Junliang Li | 2025-07-01 |