Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12411424 | Temperature conditioning system, a lithographic apparatus and a method of temperature conditioning an object | Remco VAN DE MEERENDONK, Daniel Jozef Maria Direcks, Günes NAKIBOGLU, Nicholas Peter Waterson, Joost André KLUGKIST +6 more | 2025-09-09 |
| 12332570 | Lithographic system provided with a deflection apparatus for changing a trajectory of particulate debris | Ronald Peter Albright, Kursat Bal, Vadim Yevgenyevich Banine, Richard Joseph Bruls, Sjoerd Frans DE VRIES +13 more | 2025-06-17 |
| 12204255 | Lithographic apparatus and method | Nicolaas Ten Kate, Joost Jeroen Ottens, Bastiaan Andreas Wilhelmus Hubertus Knarren, Robbert Jan Voogd, Giovanni Nino +3 more | 2025-01-21 |