Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12422758 | Lithographic apparatus, temperature sensor, and fiber Bragg grating sensor | Mahesh Ajgaonkar, Gerardus Hubertus Petrus Maria Swinkels, Laurentius Johannes Adrianus Van Bokhoven, Koen Martin Willem Jan BOS | 2025-09-23 |
| 12411424 | Temperature conditioning system, a lithographic apparatus and a method of temperature conditioning an object | Remco VAN DE MEERENDONK, Daniel Jozef Maria Direcks, Günes NAKIBOGLU, Nicholas Peter Waterson, Sven Pekelder +6 more | 2025-09-09 |