Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12270118 | Substrate supporting plate, thin film deposition apparatus including the same, and thin film deposition method | Seung Woo Choi, Dong Seok Kang, Jong Won Shon | 2025-04-08 |
| 12188121 | Method of depositing silicon oxide films | Tae Ho Yoon, Hyung Sang Park | 2025-01-07 |