Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12270118 | Substrate supporting plate, thin film deposition apparatus including the same, and thin film deposition method | Yong Min Yoo, Seung Woo Choi, Dong Seok Kang | 2025-04-08 |