Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12392035 | Powder atomic layer deposition equipment and gas supply method therefor | Chae-Woong Kim, Su-han Song | 2025-08-19 |
| 12188121 | Method of depositing silicon oxide films | Tae Ho Yoon, Yong Min Yoo | 2025-01-07 |