Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12417933 | Wafer far edge temperature measurement system with lamp bank alignment | Shujin Huang, Junwei Su, Xing Lin | 2025-09-16 |
| 12394659 | Susceptors with film deposition control features | Shujin Huang, Junwei Su, Xing Lin, Alexandros T. Demos, Wentao Wang +6 more | 2025-08-19 |
| 12234554 | Semiconductor deposition reactor and components for reduced quartz devitrification | Junwei Su, Wentao Wang, Chuqin Zhou, Xing Lin | 2025-02-25 |