Issued Patents 2025
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12417933 | Wafer far edge temperature measurement system with lamp bank alignment | Rutvij Naik, Shujin Huang, Xing Lin | 2025-09-16 |
| 12394659 | Susceptors with film deposition control features | Shujin Huang, Xing Lin, Alexandros T. Demos, Rutvij Naik, Wentao Wang +6 more | 2025-08-19 |
| D1067204 | Susceptor | Shujin Huang, Wentao Wang, Xing Lin | 2025-03-18 |
| 12234554 | Semiconductor deposition reactor and components for reduced quartz devitrification | Rutvij Naik, Wentao Wang, Chuqin Zhou, Xing Lin | 2025-02-25 |