Issued Patents 2025
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12417933 | Wafer far edge temperature measurement system with lamp bank alignment | Rutvij Naik, Shujin Huang, Junwei Su | 2025-09-16 |
| 12394659 | Susceptors with film deposition control features | Shujin Huang, Junwei Su, Alexandros T. Demos, Rutvij Naik, Wentao Wang +6 more | 2025-08-19 |
| 12378665 | High temperature coatings for a preclean and etch apparatus and related methods | Peipei Gao, Alexandros T. Demos, Chuang Wei, Wentao Wang, Mingyang Ma +1 more | 2025-08-05 |
| 12354893 | Fixture and method for determining position of a target in a reaction chamber | Siyao Luan, Peipei Gao, Alexandros T. Demos, Kishor Patil | 2025-07-08 |
| 12272527 | Apparatus for use with hydrogen radicals and method of using same | Chuang Wei, Wentao Wang, Peipei Gao, Fei Wang, Bubesh Babu Jotheeswaran | 2025-04-08 |
| D1067204 | Susceptor | Shujin Huang, Junwei Su, Wentao Wang | 2025-03-18 |
| 12234554 | Semiconductor deposition reactor and components for reduced quartz devitrification | Rutvij Naik, Junwei Su, Wentao Wang, Chuqin Zhou | 2025-02-25 |