Issued Patents 2025
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12347719 | Floating pin for substrate transfer | Sreenath SOVENAHALLI, Kirankumar Neelasandra SAVANDAIAH, Bhaskar PRASAD, Thomas Brezoczky | 2025-07-01 |
| 12266551 | Apparatus, system, and method for non-contact temperature monitoring of substrate supports | Bhaskar PRASAD, Kirankumar Neelasandra SAVANDAIAH, Thomas Brezoczky | 2025-04-01 |
| 12217982 | Isolated volume seals and method of forming an isolated volume within a processing chamber | Kirankumar Neelasandra SAVANDAIAH, Nitin Bharadwaj SATYAVOLU, Bhaskar PRASAD, Thomas Brezoczky | 2025-02-04 |
| 12195314 | Cathode exchange mechanism to improve preventative maintenance time for cluster system | Bhaskar PRASAD, Kirankumar Neelasandra SAVANDAIAH, Thomas Brezoczky | 2025-01-14 |