Issued Patents 2025
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12381101 | Semiconductor process equipment | Bhaskar PRASAD, Thomas Brezoczky, Lakshmikanth Krishnamurthy SHIRAHATTI | 2025-08-05 |
| 12368028 | Apparatus for improved high pressure plasma processing | William Johanson, Cory Eugene Lafollett | 2025-07-22 |
| 12347719 | Floating pin for substrate transfer | Sreenath SOVENAHALLI, Bhaskar PRASAD, Srinivasa Rao YEDLA, Thomas Brezoczky | 2025-07-01 |
| 12338527 | Shutter disk for physical vapor deposition (PVD) chamber | Zhiyong Wang, Halbert Chong, Irena H. Wysok, Jianxin Lei, Rongjun Wang +2 more | 2025-06-24 |
| D1072774 | Target profile for a physical vapor deposition chamber target | Shane Lavan, Madan Kumar Shimoga Mylarappa, Sundarapandian Ramalinga Vijayalakshmi REDDY, Avinash NAYAK, Wei Dou +2 more | 2025-04-29 |
| 12266551 | Apparatus, system, and method for non-contact temperature monitoring of substrate supports | Bhaskar PRASAD, Thomas Brezoczky, Srinivasa Rao YEDLA | 2025-04-01 |
| 12217982 | Isolated volume seals and method of forming an isolated volume within a processing chamber | Nitin Bharadwaj SATYAVOLU, Srinivasa Rao YEDLA, Bhaskar PRASAD, Thomas Brezoczky | 2025-02-04 |
| 12195314 | Cathode exchange mechanism to improve preventative maintenance time for cluster system | Bhaskar PRASAD, Thomas Brezoczky, Srinivasa Rao YEDLA | 2025-01-14 |