Issued Patents 2025
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12381101 | Semiconductor process equipment | Kirankumar Neelasandra SAVANDAIAH, Thomas Brezoczky, Lakshmikanth Krishnamurthy SHIRAHATTI | 2025-08-05 |
| 12347719 | Floating pin for substrate transfer | Sreenath SOVENAHALLI, Kirankumar Neelasandra SAVANDAIAH, Srinivasa Rao YEDLA, Thomas Brezoczky | 2025-07-01 |
| 12266551 | Apparatus, system, and method for non-contact temperature monitoring of substrate supports | Kirankumar Neelasandra SAVANDAIAH, Thomas Brezoczky, Srinivasa Rao YEDLA | 2025-04-01 |
| 12217982 | Isolated volume seals and method of forming an isolated volume within a processing chamber | Kirankumar Neelasandra SAVANDAIAH, Nitin Bharadwaj SATYAVOLU, Srinivasa Rao YEDLA, Thomas Brezoczky | 2025-02-04 |
| 12195314 | Cathode exchange mechanism to improve preventative maintenance time for cluster system | Kirankumar Neelasandra SAVANDAIAH, Thomas Brezoczky, Srinivasa Rao YEDLA | 2025-01-14 |