Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12148650 | Thermal diffuser for a semiconductor wafer holder | Sanhong Zhang, Martin Wallinger, Blake Parkinson | 2024-11-19 |
| 12127310 | Multi-zone pedestal heater without vias | Stanton Hopkins Breitlow, Mohammad Nosrati, Kevin Smith, Brittany Phillips, Ken Ames +2 more | 2024-10-22 |
| 12046502 | Electrostatic puck and method of manufacture | Patrick Margavio, Kurt English | 2024-07-23 |
| 11895741 | Multi-zone pedestal heater having a routing layer | Stanton Hopkins Breitlow, Mohammad Nosrati, Kevin Smith, Brittany Phillips, Ken Ames +2 more | 2024-02-06 |