Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12148650 | Thermal diffuser for a semiconductor wafer holder | Sanhong Zhang, Kevin Ptasienski, Blake Parkinson | 2024-11-19 |
| 12048069 | Thermal system with a temperature limiting device | Julian MICHELSEN | 2024-07-23 |
| 12030224 | High dynamic temperature control system | Gerhard Schefbanker, Wolfgang Pöschl, Gernot Antosch, Reinhardt Lehnert, Michael Kübler +1 more | 2024-07-09 |