Issued Patents 2024
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12163224 | Methods for depositing a conformal metal or metalloid silicon nitride film | Moo-Sung Kim, Anupama Mallikarjunan, Aaron Dangerfield, Luis Fabián Peña, Yves Chabal | 2024-12-10 |
| 12049695 | Compositions and methods using same for deposition of silicon-containing film | Raymond Nicholas Vrtis, William Robert Entley, Robert Gordon Ridgeway, John Francis Lehmann, Manchao Xiao | 2024-07-30 |
| 12018040 | Organoamino-functionalized cyclic oligosiloxanes for deposition of silicon-containing films | Matthew R. MacDonald, Manchao Xiao, Meiliang Wang | 2024-06-25 |
| 11952465 | Organoamino-functionalized linear and cyclic oligosiloxanes for deposition of silicon-containing films | Manchao Xiao, Matthew R. MacDonald, Meiliang Wang | 2024-04-09 |
| 11913112 | Processes for depositing silicon-containing films using halidosilane compounds and compositions | Jianheng Li, John Francis Lehmann, Alan Charles Cooper | 2024-02-27 |
| 11884689 | Alkoxysilacyclic or acyloxysilacyclic compounds and methods for depositing films using same | Robert Gordon Ridgeway, Raymond Nicholas Vrtis, Jennifer Lynn Anne Achtyl, William Robert Entley | 2024-01-30 |