Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12021152 | Process to reduce plasma induced damage | Lai ZHAO, Yujia Zhai, Soo Young Choi | 2024-06-25 |
| 11913112 | Processes for depositing silicon-containing films using halidosilane compounds and compositions | Xinjian Lei, John Francis Lehmann, Alan Charles Cooper | 2024-02-27 |