Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12163224 | Methods for depositing a conformal metal or metalloid silicon nitride film | Xinjian Lei, Moo-Sung Kim, Anupama Mallikarjunan, Aaron Dangerfield, Yves Chabal | 2024-12-10 |