Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12131919 | Substrate cleaning apparatus and substrate cleaning method | Masami Akimoto | 2024-10-29 |
| 11865590 | Substrate cleaning method, processing container cleaning method, and substrate processing device | Kyoko Ikeda, Kazuya Dobashi, Kenji Sekiguchi, Shuuichi Nishikido, Masato Nakajo +1 more | 2024-01-09 |