MA

Masami Akimoto

TL Tokyo Electron Limited: 1 patents #284 of 870Top 35%
Overall (2024): #365,822 of 561,600Top 70%
1
Patents 2024

Issued Patents 2024

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
12131919 Substrate cleaning apparatus and substrate cleaning method Tsunenaga Nakashima 2024-10-29