Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11865590 | Substrate cleaning method, processing container cleaning method, and substrate processing device | Kazuya Dobashi, Tsunenaga Nakashima, Kenji Sekiguchi, Shuuichi Nishikido, Masato Nakajo +1 more | 2024-01-09 |