Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12123778 | Thermal imaging sensor for integration into track system | Michael A. Carcasi, Kazuhiro Shiba, Masahide Tadokoro, Masashi Enomoto | 2024-10-22 |
| 12051189 | Estimation model creation device, estimation model creation method, and storage medium | Masato Hosaka | 2024-07-30 |
| 11876022 | Substrate treatment method and substrate treatment system | Masashi Enomoto, Hiroshi Nakamura | 2024-01-16 |
| 11862496 | Substrate processing control method, substrate processing apparatus and storage medium | Yoshitaka Konishi | 2024-01-02 |