Issued Patents 2024
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12148147 | Substrate inspection device, substrate inspection method, and storage medium | Masato Hosaka | 2024-11-19 |
| 12123778 | Thermal imaging sensor for integration into track system | Michael A. Carcasi, Kazuhiro Shiba, Masahide Tadokoro, Toyohisa Tsuruda | 2024-10-22 |
| 12051587 | Substrate processing apparatus, estimation method of substrate processing and recording medium | Hiroshi Nakamura, Masahide Tadokoro | 2024-07-30 |
| 12002676 | Method for forming mask pattern, storage medium, and apparatus for processing substrate | Takashi Yamauchi, Shinichiro KAWAKAMI | 2024-06-04 |
| 11876022 | Substrate treatment method and substrate treatment system | Hiroshi Nakamura, Toyohisa Tsuruda | 2024-01-16 |