MT

Masahide Tadokoro

TL Tokyo Electron Limited: 2 patents #140 of 870Top 20%
Overall (2024): #137,286 of 561,600Top 25%
2
Patents 2024

Issued Patents 2024

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
12123778 Thermal imaging sensor for integration into track system Michael A. Carcasi, Kazuhiro Shiba, Masashi Enomoto, Toyohisa Tsuruda 2024-10-22
12051587 Substrate processing apparatus, estimation method of substrate processing and recording medium Hiroshi Nakamura, Masashi Enomoto 2024-07-30