TS

Tetsuya Sakazaki

TL Tokyo Electron Limited: 1 patents #284 of 870Top 35%
Overall (2024): #246,126 of 561,600Top 45%
1
Patents 2024

Issued Patents 2024

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11915941 Dynamically adjusted purge timing in wet atomic layer etching Jacques Faguet, Paul Abel 2024-02-27