Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12020968 | Method for adjusting contact position of lift pins, method for detecting contact position of lift pins, and substrate placement mechanism | — | 2024-06-25 |
| 12002662 | Electrostatic attraction device and neutralization method | Hideomi Hosaka | 2024-06-04 |
| 11862439 | Substrate processing apparatus and charge neutralization method for mounting table | Hideomi Hosaka, Kouichi Nakajima, Masamichi Hara | 2024-01-02 |