Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12002662 | Electrostatic attraction device and neutralization method | Takahiro KAWAWA | 2024-06-04 |
| 11862439 | Substrate processing apparatus and charge neutralization method for mounting table | Takahiro KAWAWA, Kouichi Nakajima, Masamichi Hara | 2024-01-02 |