Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11862439 | Substrate processing apparatus and charge neutralization method for mounting table | Takahiro KAWAWA, Hideomi Hosaka, Kouichi Nakajima | 2024-01-02 |
| 11862488 | Substrate stage | Yasuyuki Kagaya | 2024-01-02 |