Issued Patents 2024
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12142462 | Method of reducing leakage of heat transfer gas and plasma processing apparatus | Akira Takahashi, Daisuke Tamura, Tsubasa Shimomura | 2024-11-12 |
| 12087559 | Plasma processing apparatus, temperature control method, and temperature control program | — | 2024-09-10 |
| 12063717 | Plasma processing apparatus, and temperature control method | — | 2024-08-13 |
| 12027349 | Plasma processing apparatus | — | 2024-07-02 |
| 11935731 | Plasma processing apparatus, plasma state detection method, and plasma state detection program | Daisuke Hayashi, Yoshihiro Umezawa | 2024-03-19 |
| 11862438 | Plasma processing apparatus, calculation method, and calculation program | — | 2024-01-02 |