Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12142462 | Method of reducing leakage of heat transfer gas and plasma processing apparatus | Shinsuke Oka, Akira Takahashi, Daisuke Tamura | 2024-11-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12142462 | Method of reducing leakage of heat transfer gas and plasma processing apparatus | Shinsuke Oka, Akira Takahashi, Daisuke Tamura | 2024-11-12 |