Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11935731 | Plasma processing apparatus, plasma state detection method, and plasma state detection program | Daisuke Hayashi, Shinsuke Oka | 2024-03-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11935731 | Plasma processing apparatus, plasma state detection method, and plasma state detection program | Daisuke Hayashi, Shinsuke Oka | 2024-03-19 |