Issued Patents 2024
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12168825 | Film formation method and film formation device | Michitaka Aita, Ken Itabashi, Takaaki Kato, Kazuki Yamada | 2024-12-17 |
| 12163898 | Method and apparatus for detecting abnormal growth of graphene | Takashi Matsumoto, Akira Fujio, Kousaku Saito | 2024-12-10 |
| 12116280 | Method and apparatus for forming graphene structure | Takashi Matsumoto | 2024-10-15 |
| 12037246 | Method for detecting abnormal growth of graphene, measurement apparatus, and film formation system | Takashi Matsumoto, Akira Fujio, Shin KONO | 2024-07-16 |
| 12018375 | Flim forming method of carbon-containing film by microwave plasma | Takashi Matsumoto, Masahito Sugiura, Makoto Wada | 2024-06-25 |
| 12014907 | Method and device for forming graphene structure | Takashi Matsumoto, Masahito Sugiura | 2024-06-18 |
| 11972929 | Processing apparatus and film forming method | Makoto Wada, Takashi Matsumoto, Masahito Sugiura, Hirokazu Ueda | 2024-04-30 |