Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12018375 | Flim forming method of carbon-containing film by microwave plasma | Ryota IFUKU, Takashi Matsumoto, Makoto Wada | 2024-06-25 |
| 12014907 | Method and device for forming graphene structure | Ryota IFUKU, Takashi Matsumoto | 2024-06-18 |
| 11972929 | Processing apparatus and film forming method | Makoto Wada, Takashi Matsumoto, Ryota IFUKU, Hirokazu Ueda | 2024-04-30 |