Issued Patents 2024
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12112921 | Plasma processing method and plasma processing apparatus | Hiroyuki Ikuta, Yutaka Fujino | 2024-10-08 |
| 12077865 | Film forming method and film forming apparatus | Hideki Yuasa, Hiroyuki Ikuta, Yutaka Fujino, Makoto Wada | 2024-09-03 |
| 12060641 | Film forming method and film forming apparatus | Hideki Yuasa, Yutaka Fujino, Yoshiyuki Kondo, Hiroyuki Ikuta | 2024-08-13 |
| 12011738 | Substrate processing method and ionic liquid | Takeo Nakano, Mitsuaki Iwashita, Naoki UMESHITA, Ryuichi Asako, Kenichi Uki | 2024-06-18 |
| 11972929 | Processing apparatus and film forming method | Makoto Wada, Takashi Matsumoto, Masahito Sugiura, Ryota IFUKU | 2024-04-30 |