Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12077855 | Cleaning method and film deposition apparatus | Hideomi HANE, Akihiro Kuribayashi | 2024-09-03 |
| 11970768 | Film forming method and film forming apparatus | Hideomi HANE, Shimon Otsuki, Takeshi Oyama, Ren MUKOUYAMA, Jun Ogawa | 2024-04-30 |