Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12077855 | Cleaning method and film deposition apparatus | Hideomi HANE, Noriaki Fukiage | 2024-09-03 |
| 11869793 | Electrostatic chuck and substrate fixing device | Hiroyuki Kobayashi | 2024-01-09 |