Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12032294 | Abnormality detection device of chemical solution, liquid processing device, substrate processing apparatus, abnormality detection method of chemical solution, liquid processing method, and substrate processing method | Takuya Mori, Hideo Shite, Hirokazu Sakamoto | 2024-07-09 |
| 11920240 | Substrate processing apparatus, state determination method and computer-readable recording medium | Ryo Araki, Junnosuke Maki, Mitsuteru Yano | 2024-03-05 |
| 11906414 | Foreign substance detection device and foreign substance detection method | Kohei Noguchi, Daisuke Kajiwara, Koudai Higashi | 2024-02-20 |
| 11879839 | Substrate processing apparatus and substrate processing method | Koudai Higashi, Kohei Noguchi | 2024-01-23 |