Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12176227 | State determination device, state determination method, and computer-readable recording medium | Masaomi Toyonaga, Atsushi Ohta, Motoi Okada, Takuro Tsutsui, Kei Sano +1 more | 2024-12-24 |
| 11920240 | Substrate processing apparatus, state determination method and computer-readable recording medium | Ryo Araki, Mitsuteru Yano, Masato Hayashi | 2024-03-05 |