Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11906414 | Foreign substance detection device and foreign substance detection method | Masato Hayashi, Kohei Noguchi, Daisuke Kajiwara | 2024-02-20 |
| 11879839 | Substrate processing apparatus and substrate processing method | Masato Hayashi, Kohei Noguchi | 2024-01-23 |