Issued Patents 2024
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12180583 | Methods of forming low resistivity titanium nitride thin film in horizontal vias and related devices | Cheng-Hsuan Kuo, SeongUk Yun, Ravindra KANJOLIA, Mansour Moinpour, Daniel Moser | 2024-12-31 |
| 12154787 | Methods of performing selective low resistivity Ru atomic layer deposition and interconnect formed using the same | Michael Breeden, Victor Wang | 2024-11-26 |
| 12080549 | Semiconductor structure with nanofog oxide adhered to inert or weakly reactive surfaces | Iljo Kwak, Kasra Sardashti | 2024-09-03 |
| 12027488 | Methods of forming stacked integrated circuits using selective thermal atomic layer deposition on conductive contacts and structures formed using the same | Mike Breeden, Victor Wang, Ming Li, Muhannad Bakir, Jonathan Hollin +2 more | 2024-07-02 |
| 11993842 | Selective deposition of metal oxide by pulsed chemical vapor deposition | Keith Tatseun Wong, Srinivas D. Nemani, James P. Huang, Yunil Cho | 2024-05-28 |
| 11993845 | High selectivity atomic layer deposition process | Jong Hun Choi, Christopher Ahles, Keith Tatseun Wong, Srinivas D. Nemani | 2024-05-28 |
| 11993844 | Passivation of silicon dioxide defects for atomic layer deposition | Steven Wolf, Michael Breeden, Ashay Anurag | 2024-05-28 |