Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12169357 | Method of fabricating and servicing a photomask | Pei-Cheng Hsu, Ta-Cheng Lien, Hsin-Chang Lee | 2024-12-17 |
| 11960201 | Method of critical dimension control by oxygen and nitrogen plasma treatment in EUV mask | Pei-Cheng Hsu, Ta-Cheng Lien, Hsin-Chang Lee | 2024-04-16 |