Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12147160 | Resist underlayer film material, patterning process, and method for forming resist underlayer film | Daisuke KORI, Takayoshi NAKAHARA, Yusuke Biyajima | 2024-11-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12147160 | Resist underlayer film material, patterning process, and method for forming resist underlayer film | Daisuke KORI, Takayoshi NAKAHARA, Yusuke Biyajima | 2024-11-19 |