Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11914295 | Thermosetting iodine- and silicon-containing material, composition containing the material for forming resist underlayer film for EUV lithography, and patterning process | Tsutomu Ogihara, Tsukasa Watanabe, Yusuke Biyajima, Masahiro Kanayama | 2024-02-27 |