Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12147374 | Distributed control system and semiconductor inspection apparatus including same | Kazushi YAMASHINA, Takashi Saegusa, Yoshiro Gunji, Tetsuji Ohsawa, Yutaka Kasai +3 more | 2024-11-19 |
| 12132411 | Power supply module and charged particle beam device | Ryo Kadoi, Wen Li | 2024-10-29 |
| 12014897 | Ventilated semiconductor processing apparatus | Akira Nishioka, Shuichi Nakagawa, Masaki Mizuochi, Takaaki Kikuchi, Masashi Fujita +1 more | 2024-06-18 |