Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12014897 | Ventilated semiconductor processing apparatus | Akira Nishioka, Shuichi Nakagawa, Masaki Mizuochi, Masashi Fujita, Kenta Nomura +1 more | 2024-06-18 |
| 11984301 | Edge ring, substrate support, substrate processing apparatus and method | Takashi Taira | 2024-05-14 |