Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11984301 | Edge ring, substrate support, substrate processing apparatus and method | Takaaki Kikuchi | 2024-05-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11984301 | Edge ring, substrate support, substrate processing apparatus and method | Takaaki Kikuchi | 2024-05-14 |