Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12147374 | Distributed control system and semiconductor inspection apparatus including same | Kazushi YAMASHINA, Takashi Saegusa, Tetsuji Ohsawa, Yutaka Kasai, Junichi Kitamura +3 more | 2024-11-19 |