Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12176185 | Apparatus and method for processing substrate using plasma | Min Sung Han, Jae Hoo Lee, Wan Jae Park | 2024-12-24 |
| 11978654 | Substrate processing apparatus | Min Sung Han, Wan Jae Park, Jaehoo Lee | 2024-05-07 |