Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12176185 | Apparatus and method for processing substrate using plasma | Jae Hoo Lee, Yoon Jong Ju, Wan Jae Park | 2024-12-24 |
| 11978654 | Substrate processing apparatus | Wan Jae Park, Yoon Jong Ju, Jaehoo Lee | 2024-05-07 |